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Yagyensh (Buno) C. Pati A. James Clark School of Engineering, University of Maryland
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Inducted in October 2009 for developing phase-shift lithography and attendant processes and technologies to enable production of subwavelength integrated circuits and thereby greatly expand the functional capabilities of electronic devices. Buno Pati developed the phase-shift lithography process for the design and manufacture of subwavelength integrated circuits, and founded
E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
Notable Alumni The Graduate School
All Inductees A. James Clark School of Engineering, University of Maryland
All Inductees A. James Clark School of Engineering, University of Maryland
Yagyensh (Buno) C. Pati A. James Clark School of Engineering, University of Maryland
All Inductees A. James Clark School of Engineering, University of Maryland
E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
A. James Clark School of Engineering - Wikipedia
All Inductees A. James Clark School of Engineering, University of Maryland
E@M Magazine, Fall 2010 by A. James Clark School of Engineering University of Maryland - Issuu
